Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

ABSTRACT

A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.

TECHNICAL FIELD

The present invention relates to a valve device.

BACKGROUND ART

In various manufacturing processes such as semiconductor manufacturingprocesses, in order to supply accurately metered process gases to aprocessing chamber, a fluid control device integrated with variousfluidic devices such as open-close valves, regulators, and mass flowcontrollers is used.

In such a fluid control device as described above, integration isrealized by arranging an installation block (hereinafter referred to asa base block) in which a flow path is formed along the longitudinaldirection of the base plate instead of a pipe joint, and installing aplurality of fluid devices including a joint block to which pipe jointsand various fluid devices are connected, and the like on the base block(for example, refer to Patent Document 1),

Patent Literature

PTL 1: Japanese Laid-Open Patent Application No. 2007-3013

SUMMARY OF INVENTION Technical Problem

To valve devices applied to fluid control device as described above,various functions are increasingly required. For example, for thepurpose of e.g. prevention of reverse flow, a bleed function isrequired, in which a predetermined flow rate of fluid is flown from theprimary flow path to the secondary flow path even when the valve isclosed.

However, in order to add the bleed function to a valve device, a bleedhole (orifice) must be formed by machining into a valve body of thevalve device, which makes the manufacturing difficult and raises thecost of the device.

It is an object to provide a valve device that can be compact, low costand has a bleed function.

Solution to Problem

A valve device according to a first aspect of the present invention is avalve device comprising a block-shaped valve body,

the valve body defining an accommodation recess opening at a surface ofthe valve body and containing a valve element, a primary flow path and asecondary flow path connected to the accommodation recess,

the valve element having a sealing portion for blocking directcommunication between the primary flow path and the secondary flow paththrough the accommodation recess, a detour passage for making theprimary flow path and the secondary flow path communicate through thevalve element, and a bleed hole for making the secondary flow path andthe detour passage communicate through the accommodation recess.

Preferably, a configuration can be employed in which the valve elementcomprises:

a valve seat having an annular seating surface formed on one endsurface, an annular sealing surface formed on the other end surface, anda flow passage formed on an inner side of the seating surface and thesealing surface and penetrating from said one end surface to the otherend surface;

a valve seat support having a support surface for contacting the sealingsurface of the valve seat and supporting a pressing force from thesealing surface; and

a diaphragm provided so as to abut to and separate from the seatingsurface supported by the valve seat support;

the diaphragm making the flow passage and the secondary flow pathcommunicate through a gap between the diaphragm and the seating surface,

the valve seat support having a sealing surface for cooperating with apart of an inner wall surface of the accommodation recess to blockcommunication between the primary flow path and the secondary flow path,and a detour passage for connecting the primary flow path and the flowpassage.

A valve device according to a second aspect of the present invention isa valve device comprising a block-shaped valve body,

the valve body defining first and second accommodation recessesrespectively containing first and second valve elements, a primary flowpath for making each of the first and second accommodation recessescommunicate to an outside of the valve body, a secondary flow path formaking each of the first and second accommodation recesses communicateto an outside of the valve body, and a communication flow path forconnecting the first and second accommodation recesses to make thesecondary flow paths communicate with each other,

each of the first and second valve elements having a sealing portion forblocking direct communication between the primary flow path and thesecondary flow path through the accommodation recess, and a detourpassage for making the primary flow path and the secondary flow pathcommunicate through the valve element,

wherein one of the first and second valve elements has a bleed hole formaking the detour passage and the secondary flow path communicatethrough the accommodation recess,

The flow rate control device of the present invention uses a fluidcontrol device including a valve device having the above configurationfor flow control of a process gas.

The product manufacturing method of the present invention comprisesusing a fluid control device including a valve device having the aboveconfiguration for controlling a process gas in a manufacturing processof a product such as a semiconductor device, a flat panel display, or asolar panel, which requires a process step using the process gas in asealed processing chamber.

The semiconductor manufacturing apparatus of the present inventioncomprises a fluid control device for supplying a process gas to aprocessing chamber,

the fluid control device including a valve device having the aboveconfiguration.

Advantageous Effects of Invention

According to the present invention, a valve device that can be compact,low cost, and has a bleed function, can be obtained.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1A is a front view including a partial longitudinal section of avalve device according to an embodiment of the present invention.

FIG. 1B is a top view of the valve device in the FIG. 1A.

FIG. 1C is a bottom view of the valve device in FIG. 1A.

FIG. 1D is a side view of the valve device in FIG. 1A.

FIG. 2 is an enlarged cross-sectional view of a main part of the valvedevice of FIG. 1A, showing a valve-closed state.

FIG. 3 is an enlarged cross-sectional view of a main part of the valvedevice in FIG. 1A, showing the valve-open state.

FIG. 4 is a cross-sectional view of the inner disk.

FIG. 5 is a cross-sectional view of the valve seat.

FIG. 6 is a cross-sectional view of the valve seat support.

FIG. 7 is a front view including a partial longitudinal section of avalve device according to still another embodiment of the presentinvention.

FIG. 8 is an enlarged cross-sectional view of a main part of a valvedevice in FIG. 7.

FIG. 9 is a schematic configuration diagram of a semiconductormanufacturing apparatus according to an embodiment of the presentinvention.

FIG. 10 is a perspective view showing an exemplary fluid control deviceto which the valve device of the present invention is applicable.

DESCRIPTION OF EMBODIMENTS

Embodiments of the present invention. will be described below withreference to the drawings. In the present specification and thedrawings, the same reference numerals are used to denote componentshaving substantially the same functions, and thus a repetitivedescription thereof is omitted.

FIGS. 1A to 1D show the structure of a valve device according to oneembodiment of the present invention, FIGS. 2 and 3 show the operation ofvalve device of FIG. 1A, FIG. 4 shows the inner disc, FIG. 5 shows thevalve seat and FIG. 6 shows the cross-sectional structure of the valveseat support.

In FIGS. 1A to 3, arrows A1 and A2 in the drawing are the verticaldirection and A1 is the upward direction, and A2 is the downwarddirection. Arrows B1 and B2 are longitudinal directions of the valvebody 20 of valve device 1, and B1 indicates one end side and B2indicates the other end side. C1, C2 shows the width directionperpendicular to the longitudinal direction B1, B2 of the valve body 20,C1 indicates the front side, and C2 indicates the rear side.

The valve body 20 is a block-like member having a rectangular shape intop view defining the top surface 20 f 1 and the bottom surface 20 f 2,and four side surfaces 20 f 3 to 20 f 6 extending between the topsurface 20 f 1 and the bottom surface 20 f 2. In addition, it defines anaccommodation recess 22 which opens at the top surface 20 f 1. As can beseen from FIG. 2 and the like, the accommodation recess 22 isconstituted by inner peripheral surfaces 22 a, 22 b and 22 c havingdifferent diameters, and the bottom surface 22 d. The diameters of theinner peripheral surfaces 22 a, 22 b and 22 c decrease in this order. Avalve element 2 to be described later is contained in the accommodationrecess 22.

The valve body 20 defines a primary flow path 21 and a secondary flowpath 24 connected to the accommodation recess 22. The primary flow path21 is a flow path on which a fluid such as a gas is supplied from theoutside, and the secondary flow path 24 is a flow path for allowing thefluid such as a gas to flow out to the outside. Primary flow path 21 isopen at the bottom surface 20 f 2 is formed to be inclined with respectto the bottom surface 20 f 2 of the valve body 20. Around the opening ofthe primary flow path 21. the seal holding portion 2Ia is formed. In theseal holding portion 21 a, a gasket (not shown) is disposed as a sealmember. The valve body 20 is connected to other flow path blocks (notshown) by fastening bolts screwed into screw holes 20 b 1. At this time,the gasket held in the seal holding portion 21 a is crushed between theseal holding portion 21 a and other flow path blocks (not shown) by thefastening force of the fastening bolts, and thereby the periphery of theopening of the primary flow path 21 is sealed,

Examples of the gasket include gaskets made of metal or resin. Examplesof the gasket include a soft gasket, a semi-metal gasket. and a metalgasket, Specifically, the following is suitably used.

(1) Soft Gasket

-   Rubber O-ring-   Rubber seat (for full seating)-   Joint sheet-   Expanded graphite sheet-   PTFE sheets-   PTFE jacketed type

(2) Semi-Metal Gasket

-   Spiral gasket (Spiral-wound gasket)-   Metal jacket gasket

(3) Metal Gasket

-   Solid-metal flat gasket-   Hollow metal O-ring-   Ring joint

The same applies to the seal-holding portions 25 a 1 and 26 b 1 providedaround the openings of the branch flow path 25 and 26, which will bedescribed later, and detailed descriptions thereof are omitted.

Secondary flow paths 24 includes two secondary flow paths 24A, 24Bformed opposite to each other with respect to the accommodation recess22 in the longitudinal direction B1, B2 of the valve body 20. Secondaryflow paths 24A, 24B are formed on a common axis J1 extending in thelongitudinal direction B1, B2 of the valve body 20. Secondary flow path24A has one end open at the inner peripheral surface 22 b of theaccommodation recess 22. and the other end 24 a 1 closed inside thevalve body 20. Secondary flow path 24B has one end is open at the innerperipheral surface 22 b of the accommodation recess 22, and the otherend 24 b 1 open at the side surface 20 f 6 side. To the opening of theside surface 20 f 6 of the secondary flow path 24B, a blocking member 30is provided and fixed by means of welding etc. to close the opening ofthe secondary flow path 24B. Secondary flow paths 24A, 24B can be easilyformed by using a tool such as a drill.

Secondary flow path 24A branches into two branch flow paths 25 at theother end 24 a 1, and they open at the top surface 20 f 1. Secondaryflow path 24B branches into two branch flow paths 26 in the middle, andthey open at the top surface 20 f 1.

That is, in valve device 1 according to the present embodiment, a flowof fluid such as a gas flowing into the primary flow path 21 can bedivided into four by the branch flow paths 25, 26 of the secondary flowpath 24.

The valve element 2 has a diaphragm 14, an inner disk 15, a valve seat16, and a valve seat support 50. The valve element 2 blocks directcommunication between the primary flow path 21 and the secondary flowpath 24 through the accommodation recess 22 and makes the primary flowpath 21 and the secondary flow path 24 communicate through the valveelement 2. Hereinafter, the valve element 2 will be described in detail.

In the accommodation recess 22, the valve seat support 50 having anouter diameter to be fitted with the inner peripheral surface 22 c isinserted.

The valve seat support 50 is, as shown in FIG. 6, a cylindrical metalmember in which a detour passage 50 a being a through hole is formed inthe central portion, and an annular support surface 50 f 1 is formedaround detour passage 50 a on the upper end surface. In addition, thevalve seat support 50 has a single bleed hole 51 formed perpendicularlyto the detour passage 50 a. The diameter of the bleed hole 50 p issufficiently smaller than the diameter of detour passage 50 a.

Support surface 50 f 1 of the valve scat support 50 is a flat surface,and on its outer peripheral portion, a step is formed. The outerperipheral surface 50 b 1 of the valve seat support 50 has a diameter tofit into the inner peripheral surface 22 c of the accommodation recess22, the outer peripheral surface 50 b 2 on the lower end side isreduced. in diameter, and there is a step between them. An annular endsurface 50 b 3 is formed by the step. As shown in FIG. 2 etc., a sealingmember 51 made of a resin such as PTFE is fitted into the outerperipheral surface 50 b 2. Sealing member 51 formed in a rectangularcross-sectional shape, has a dimension to be crushed between the endsurface 50 b 3 of the valve seat support 50 and the bottom surface 22 dof the accommodation recess 22 as to be described later. When thesealing member 51 is crushed between the end surface 50 b 3 of the valveseat support 50 and the bottom surface 22 d of the accommodation recess22, the resin enters between the outer peripheral surface 50 b 1 of thevalve seat support 50 and the inner peripheral surface 22 c and thebottom surface 22 d of the accommodation recess 22, to reliably seal agap between the valve seat support 50 and the accommodation recess 22.That is, the outer peripheral surface 50 b 2 and the end surface 50 b 3as the sealing portions cooperate with the inner peripheral surface 22 cand the bottom surface 22 d of the accommodation recess 22 to block thecommunication between the primary flow path 21 and the secondary flowpath 24.

Detour passage 50 a of the valve seat support 50 is connected to theprimary flow path 21 which opens at the bottom surface 22 d of theaccommodation recess 22.

On the support surface 50 f 1 of the valve seat support 50, the valveseat 16 is provided.

As shown in FIG. 5, the valve seat 16 is formed in an annular shape of aresin such as PFA or PTFE so as to be elastically deformable, and has anannular seating surface 16 s formed on one end surface and an annularsealing surface 16 f formed on the other end surface of the valve seat16. Inside the seating surface 16 s and the sealing surface 16 f, a flowpassage 16 a being a through hole is formed. Valve seat 16 has asmall-diameter portion 16 b 1 and the large-diameter portion 16 b 2 onits outer peripheral side, a stepped portion is formed between thesmall-diameter portion 16 b 1 and the large-diameter portion 16 b 2.

Valve seat 16 is positioned with respect to the support surface 50 f 1of the valve seat support 50, and is pressed toward the support surface50 f 1 of the valve seat support 50 by the inner disk 15 as apositioning pressing member. Specifically, a large diameter portion 15 a1 and the small diameter portion 15 a 2 are formed in the center of theinner disk 15, and the stepped surface 15 a 3 is formed between thelarge diameter portion 15 a 1 and the small diameter portion 15 a 2. Onone end surface side of the inner disk 15, an annular flat surface 15 f1 is formed. On the other end surface side of the inner disk 15, anannular flat surface 15 f 2 is formed on the outside, and an annularflat surface 15 f 3 is formed on the inside. The height is differentfrom the flat surface 15 f 2 and the flat surface 15 f 3, and the flatsurface 15 f 3 is located near the flat surface 15 f 1. On the outerperipheral side of the inner disk 15, an outer peripheral surface 15 bto be fitted to the inner peripheral surface 22 a of the accommodationrecess 22 is formed. Furthermore, a plurality of flow passages 15 hpenetrating from one end surface to the other end surface is formed atequal intervals in the circumferential direction. The large-diameterportion 16 b 2 and the small-diameter portion 16 b 1 of the valve seat16 are fitted to the large-diameter portion 15 a 1 and thesmall-diameter portion 15 a 2 of the inner disk 15, and thereby thevalve seat 16 is positioned with respect to the support surface 50 f 1of the valve seat support 50.

The flat surface 15 f 2 of the inner disk 15 is installed on a flatstepped surface formed between the inner peripheral surface 22 a and theinner peripheral surface 22 b of the accommodation recess 22. On theflat surface 15 f 1 of the inner disk 15, a diaphragm 14 is installed,and on the diaphragm 14, a pressing ring 13 is installed.

The actuator 10 is driven by a driving source such as a pneumaticpressure, and moves the diaphragm presser 12 movably held in thevertical directions A1 and A2. The fore-end portion of the casing 11 ofthe actuator 10, as shown in FIG. 1A, is screwed into and fixed to thevalve body 20. Then, the fore-end portion presses the pressing ring 13downward A2, and thereby the diaphragm 14 is fixed in the accommodationrecess 22. The diaphragm 14 seals the accommodation recess 22 at theopening side. In addition, the inner disk 15 is also pressed in downwarddirection A2. The height of the stepped surface 15 a 3 is set so thatthe stepped surface 15 a 3 presses the valve seat 16 toward the supportsurface 50 f 1. of the valve seat support 50, when the flat surface 15 f2 of the inner disk 115 is pressed against the stepped surface of theaccommodation recess 22. Further, the flat surface 15 f 3 of the innerdisk 15 is adapted not to abut on the upper end surface of the valveseat support 50.

The diaphragm 14 has a larger diameter than the valve seat 16, and ismade of a metal such as stainless steel or NiCo alloys or afluorine-based resin in a spherical shell shape so as to be elasticallydeformable. The diaphragm 14 is supported on the valve body 20 so as tobe able to abut to and separate from the seating surface 16 s of thevalve seat 16.

In FIG. 2, the diaphragm 14 is elastically deformed by being pressed bythe diaphragm presser 12, and pressed against the seating surface 16 sof the valve seat 16 to close the valve. In this condition, even whenthe valve is closed, a predetermined flow rate of the fluid flows fromthe primary flow path 21 to the secondary flow path 24 through the bleedhole 50 p. As a result, the secondary flow path 24 is constantly filledwith the fluid supplied to the primary flow path 21.

Diaphragm 14 restores the spherical shell shape as shown in FIG. 3 whenthe pressing force by the diaphragm presser 12 is released. When thediaphragm 14 is pressed against the seating surface 16 s of the valveseat 16, the flow path between the primary flow path 21 and thesecondary flow path 24 is in a closed state. When the diaphragm presser12 is moved in the upward direction A1, as shown in FIG. 3, thediaphragm 14 is moved away from the seating surface 16 s of the valveseat 16. Then, the fluid supplied from the primary flow path 21 passesthrough the gap between the diaphragm 14 and the seating surface 16 s ofthe valve seat 16, through the secondary flow path 24A, flows into 24B,and eventually flows out of the valve body 20 through the branch flowpaths 25 and 26,

As described above, according to the present embodiment, the bleedfunction can be easily added to valve device 1 by forming the bleed hole50 p in the valve seat support, which is a component of the valveelement 2, without directly forming the bleed hole 50 p in the valvebody 20. Further, since there is no need to enlarge the valve body 20for the bleed hole 50. it is also possible to maintain theminiaturization of the valve body 20.

In the above embodiment, the secondary flow path 24 branches into aplurality of branches in the valve body 20, and the branch flow paths 25and 26 open at the top surface 20 f 1 of the valve body 20, but thepresent invention is not limited to this, and the present invention mayemploy a configuration in which the secondary flow path 24 opens ateither the bottom surface 20 f 2 or the side surfaces 20 f 3 to 20 f 6.

In the above embodiment, the inner disk 15 and the valve seat 16 areseparate members, but it is also possible to integrate the inner disk 15and the valve seat 16.

Second Embodiment

FIG. 7 shows a valve device 1B according to the second embodiment of thepresent invention, and FIG. 8 shows an enlarged cross-sectional view ofa main part of the valve device in FIG. 7. In FIGS. 7 and 8. the samereference numerals are used for the same components as in the aboveembodiment.

The valve device 1B according to the present embodiment has two valveelements 2A, 2B in a common valve body 20.

Valve body 20 defines two accommodation recesses 22A, 22B which open atthe top surface 20 f 1. The accommodation recesses 22A and 22B have thesame structure as that of the above accommodation recess 22, and arespaced apart from each other in the longitudinal directions B1 and B2.The accommodation recesses 22A and 22B contain valve elements 2A and 2B,respectively. The valve body 20 defines primary flow paths 21A and 21Bconnected to the first and second accommodation recesses 22A and 22B,respectively, secondary flow paths 24A and 24B connected to theaccommodation recess 22A and 22B, respectively, and a communication flowpath 24C for connecting the accommodation recesses 22A and 22B. Thecommunication flow path 24C functions as a part of the secondary flowpath 24.

Primary flow path 21A is formed to be inclined with respect to thebottom surface 20 f 2 of the valve body 20. one end is connected to thebottom surface 22 d of the accommodation recess 22A, and the other endis open at the bottom surface 20 f 2.

Primary flow path 21B is formed to be inclined in the opposite directionto the primary flow path 21A with respect to the bottom surface 20 f 2of the valve body 20, one end is connected by the bottom surface 22 d ofthe accommodation recess 22B, the other end is open at the bottomsurface 20 f 2.

Seal holding portions 21 a and 21 b similar to the seal holding portion21 a described above are formed around the openings of the primary flowpath 21A and 21B, respectively.

Secondary flow path 24 includes two secondary flow paths 24A and 24Bformed on opposite sides with respect to the accommodation recesses 22A,22B in the longitudinal direction B1, B2 of the valve body 20, and acommunication flow path 24C connecting the accommodation recesses 22Aand 22B.

The secondary flow path 24A, 24B and the communication flow path 24C areformed on a common axis J1 extending in the longitudinal direction B1,B2 of the valve body 20.

Secondary flow path 24A has one end opening at the inner peripheralsurface 22 b of the accommodation recess 22A, and the other end 24 a 1closed inside the valve body 20.

Secondary flow path 24B has one end opening at the inner peripheralsurface 22 b of the accommodation recess 22B, and the other end 24 b 1open at the side surface 20 f 6 side.

To the opening at the side surface 20 f 6 of the secondary flow path24B, the blocking member 30 is provided and fixed by means of weldingetc. to close the opening of the secondary flow path 24B.

Communication flow path 24C has one end open at the inner peripheralsurface 22 b of the accommodation recess 22A, and the other end open atthe inner peripheral surface 22 b of the accommodation recess 22B. Thesecondary flow path 24A and the secondary flow path 24B communicate witheach other via a communication flow path 24C.

The secondary flow paths 24A, 24B and communication flow path 24C, whichconstitute the secondary flow path 24, can be easily formed by usingtools such as drills. Incidentally, the secondary flow path 24 may beformed by machining using a drill etc. from the other end of the valvebody 20, or may be formed by machining using a drill etc. from both oneend and the other end to form respective holes and connecting them inthe valve body 20.

Secondary flow path 24A branches into two branch flow paths 25 at theother end 24 a 1, and they open at the top surface 20 f 1.

Secondary flow path 24B branches into two branch flow paths 26 in themiddle, and they open at the top surface 20 f 1.

The valve element 2A is basically the same as the valve element 2 of thefirst embodiment, but the valve element 2B is not provided with bleedhole 50 p in the valve seat support 50. Namely, the valve element 2A isprovided with the bleed function, but the valve element 2B is notprovided with the bleed function,

Thus, two valve elements 2A and 2B can be provided on the common valvebody 20. and a bleed function can be provided only to one valve element2A. The fluid supplied from the primary flow path 21A, or 21B commonlyflows out to the secondary flow paths 24A, 24B and 24C. Among the valveelement 2A and the valve element 2B, one is selectively opened and theother is closed.

Next, referring to FIG. 9, an application of the above-described valvedevice 1 will be described.

Semiconductor manufacturing apparatus 1000 shown in FIG. 9 is a systemfor performing a semiconductor manufacturing process by atomic layerdeposition (ALD. Atomic Layer Deposition), where 600 denotes a processgas source, 700 denotes a gas box, 710 denotes a tank, 720 denotes avalve, 800 denotes a processing chamber, and 900 denotes an exhaustpump.

In a treatment process for depositing a film on a substrate, in order tostably supply a process gas, a process gas supplied from a gas box 700is temporarily stored in a tank 710 as a buffer, and a valve 720provided in the immediate vicinity of the processing chamber 800 isopened and closed at high frequency to supply the process gas from thetank to the processing chamber 800 in a vacuum atmosphere.

The ALD method is one of chemical vapor deposition methods, in which twoor more types of process gases are alternately flowed on the substratesurface under film forming conditions such as temperature and time toreact with atoms on the substrate surface to deposit a film layer bylayer, and since the monoatomic layer can be controlled, a uniform filmthickness can be formed and a film can be grown very densely in terms offilm quality.

In the semiconductor manufacturing process by the ALD method, it isnecessary to precisely adjust the flow rate of the process gas, and tocope with the increase of the diameter of the substrate or the like, itis also necessary to ensure a certain amount of flow rate of the processgas.

The gas box 700 houses an integrated fluid control device of variousfluid devices in a box to provide a precisely metered process gas to theprocessing chamber 800. Fluid control devices include the valve device1, 1B described above.

The tank 710 functions as a buffer for temporarily storing the processgas supplied from the gas box 700.

The processing chamber 800 provides a sealed processing space fordepositing a film on a substrate by an ALD method.

Exhaust pump 900 draws a vacuum in the processing chamber 800.

Referring to FIG. 10, an exemplary fluid control device to which theinventive valve device is applicable will be described.

In the fluid control device shown in FIG. 10, a metallic base plate BSextending in the longitudinal direction G1, G2 and arranged along thewidth direction W1, W2 is provided. Note that W1 represents the frontside, W2 represents the back side, G1 represents the upstream side, andG2 represents the downstream side. Various fluid devices 991 A to 991Eare installed on the base plate BS via a plurality of flow path blocks992, and a flow path (not shown) through which fluid flows from theupstream side G1 to the downstream side G2 is formed by the plurality offlow path blocks 992.

Here, a “fluid device” is a device used in a fluid control device forcontrolling the flow of a fluid, the device comprising a body defining afluid flow path and having at least two flow path ports opening at thesurfaces of the body. Specifically, the fluid devices include open/closevalves (2-way valves) 991A, regulators 991B, pressure gauges 991C,open/close valves (3-way valves) 991D, mass flow controllers 991E andthe like, but not limited thereto. The inlet tube 993 is connected to anupstream flow path port of flow path (not shown).

The present invention can be applied to various valve devices such asthe above-described open/close valves 991A and 991D and the regulator991B.

REFERENCE SIGNS LIST

1, 1B: Valve device

2, 2A, 2B: Valve element

10, 110A, 10B: Actuator

11: Casing

12: Diaphragm presser

13: Pressing ring

14: Diaphragm

15: Inner disk

15 h: Flow passage

16: Valve seat

16 a: Flow passage

16 f: Sealing surface

16 s: Seating surface

20: Valve body

20 f 1: Top surface

20 f 2: Bottom surface

20 f 3-20 f 6: Side surface

20 b 1: Screw hole

21, 21A, 21B: Primaryflow path

21 a: Seal holding portion

22, 22A, 22B: Accommodation recess

24A, 24B, 24C, 24: Secondary flow path

25,26: Branch flow path

30: Blocking member

50: Valve seat support

50 a: Detour passage

50 f 1: Support surface

50 b 2: Outer peripheral surface (sealing surface, sealing portion)

50 b 3: End surface (sealing surface, sealing portion)

50 p: Bleed hole

51: Sealing member

600: Process gas source

700: Gas box

710: Tank

720: Valve

800: Processing chamber

900: Exhaust pump

1000: Semiconductor manufacturing apparatus

A1: Upward

A2: Downward

991A: Open/close valve

991B: Regulator

991C: Pressure gauge

991D: Open/close valve

991E: Mass flow controller

992: Flow path blocks

993: Inlet tube

BS: Base plate

G1: Longitudinal direction (upstream?

G2: Longitudinal direction (downstream)

W1: Width direction

W2: Width direction

1. A valve device comprising a block-shaped valve body, the valve bodydefining an accommodation recess opening at a surface of the valve bodyand containing a valve element, a primary flow path and a secondary flowpath connected to the accommodation recess, the valve element having asealing portion for blocking direct communication between the primaryflow path and the secondary flow path through the accommodation recess,a detour passage for making the primary flow path and the secondary flowpath communicate through the valve element, and a bleed hole for makingthe secondary flow path and the detour passage communicate through theaccommodation recess.
 2. The valve device according to claim 1, whereinthe valve element comprises: a valve seat having an annular seatingsurface formed on one end surface, and an annular sealing surface formedon the other end surface, and a flow passage formed on an inner side ofthe seating surface and the sealing surface and penetrating from saidone end surface to the other end surface; a valve seat support having asupport surface for contacting the sealing surface of the valve seat andsupporting a pressing force from the sealing surface; and a diaphragmprovided so as to abut to and separate from the seating surfacesupported by the valve seat support; the diaphragm making the flowpassage and the secondary flow path communicate through a gap betweenthe diaphragm and the seating surface, the valve seat support having asealing surface for cooperating with a part of an inner wall surface ofthe accommodation recess to block communication between the primary flowpath and the secondary flow path, and a detour passage for connectingthe primary flow path and the flow passage.
 3. A valve device comprisinga block-shaped valve body, the valve body defining first and secondaccommodation recesses respectively containing first and second valveelements, a primary flow path for making each of the first and secondaccommodation recesses communicate to an outside of the valve body, asecondary flow path for making each of the first and secondaccommodation recesses communicate to an outside of the valve body, anda communication flow path for connecting the first and secondaccommodation recesses to make the secondary flow paths communicate witheach other, each of the first and second valve elements having a sealingportion for blocking direct communication between the primary flow pathand the secondary flow path through the accommodation recess, and adetour passage for making the primary flow path and the secondary flowpath communicate through the valve element, wherein one of the first andsecond valve elements has a bleed hole for making the detour passage andthe secondary flow path communicate through the accommodation recess. 4.A fluid control device comprising a plurality of fluid devices that isarranged, the plurality of fluid devices including the valve device asclaimed in claim
 1. 5-7. (canceled)